Real-Time RHEED Feedback

AtomCloud RHEED uses validated AI models to transform a live stream of RHEED images as-collected into a series of signal rich fingerprints and metrics. Fully automated with no setup or parameter tuning, working seamlessly with wafer rotation.

Example of a strain plot.

Within seconds of measurement, we deliver multiple sets of physical material properties that provide a foundation for informed manual intervention and dynamic, automated process control, including:

• Lattice Spacing

• Surface Reconstruction

• Growth Rate

• Strain

• 24+ raw metrics

For rotating data, metrics are classified by the azimuth of automatically detected high symmetry angles.

How-to:

1

Begin by streaming your RHEED feed to AtomCloud using the instructions here.

2

2) Once a stream is active click View Analysis to open the Real-Time workspace:

3

Build real-time plots in the Growth Analysis panel at the bottom of the workspace by clicking Add Data to Chart:

4

Select a plot series from the Chart Setup menu (e.g., Lattice Spacing)

5

Then select the azimuth angle seed frame for the series you wish to plot (if available)