📐In-situ Proxy for Ex-situ Measurements
Correlating diffraction features with ex-situ composition measurements enables near real-time information about composition in future runs.
Automated information extraction identifies and quantifies relationships between recipe and tool metrology, in-situ monitoring, and ex-situ characterization without adding time to your workflow.
RHEED pattern metrics were found to correlate with doping concentration determined by ex-situ XPS
The top 3 pattern features correlated with doping-composition from XPS and fit a linear regression.
The derived linear relationship from three initial samples was used to predict concentrations for remaining samples with good agreement to the model.
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